{"id":7760,"date":"2026-03-04T10:36:35","date_gmt":"2026-03-04T10:36:35","guid":{"rendered":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/?post_type=brochure_page&p=7760"},"modified":"2026-08-12T07:12:50","modified_gmt":"2026-08-12T07:12:50","slug":"technical-specifications","status":"publish","type":"brochure_page","link":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/brochure\/next-turbomolecular-pumps-3601-0886-01\/technical-specifications\/","title":{"rendered":"TECHNICAL SPECIFICATIONS"},"content":{"rendered":"
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\n \n <\/span>\n <\/span>\n TECHNICAL SPECIFICATIONS<\/span>\n <\/span>\n <\/h1>\n <\/div>\n <\/div>\n\t<\/div>\n<\/section>\n\n\n
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\n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n \n
<\/th>\n <\/tr>\n
\n <\/td>\n \n <\/td>\n \n nEXT55 <\/td>\n \n nEXT85 <\/td>\n <\/tr>\n <\/thead>\n
\n Inlet flange <\/td>\n \n <\/td>\n \n NW40 <\/td>\n \n ISO-K 63\/CF 63 <\/td>\n \n NW40 <\/td>\n \n DN63 ISO-K or DN63 CF <\/td>\n \n DN100 ISO-K <\/td>\n <\/tr>\n
\n Inlet pumping speed ls-1<\/sup> <\/td>\n \n N2<\/sub> <\/td>\n \n 35 <\/td>\n \n 55 <\/td>\n \n 47 <\/td>\n \n 84 <\/td>\n \n 86 <\/td>\n <\/tr>\n
\n Ar <\/td>\n \n 35 <\/td>\n \n 55 <\/td>\n \n 44 <\/td>\n \n 80 <\/td>\n \n 84 <\/td>\n <\/tr>\n
\n He <\/td>\n \n 26 <\/td>\n \n 41 <\/td>\n \n 61 <\/td>\n \n 78 <\/td>\n \n 80\/78 (D\/H) <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 17 <\/td>\n \n 27 <\/td>\n \n 49\/44 (D\/H) <\/td>\n \n 60\/54 (D\/H) <\/td>\n \n 60\/54 (D\/H) <\/td>\n <\/tr>\n
\n Compression ratio (D) <\/td>\n \n N2<\/sub>\/Ar <\/td>\n \n >1 x 1011<\/sup> <\/td>\n <\/tr>\n
\n He <\/td>\n \n 6.9 x 105<\/sup> <\/td>\n \n 8 x 106<\/sup> <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 2.9 x 104<\/sup> <\/td>\n \n 2 x 105<\/sup> <\/td>\n <\/tr>\n
\n Compression ratio (T\/H) <\/td>\n \n N2<\/sub>\/Ar <\/td>\n \n NA <\/td>\n \n >1 x 1011<\/sup> <\/td>\n <\/tr>\n
\n He <\/td>\n \n NA <\/td>\n \n 2 x 107<\/sup> <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n NA <\/td>\n \n 5 x 105<\/sup> <\/td>\n <\/tr>\n
\n Backing\/interstage\/boost ports <\/td>\n \n <\/td>\n \n NW16 <\/td>\n <\/tr>\n
\n Vent\/purge port <\/td>\n \n <\/td>\n \n 1\/8 inch BSPP <\/td>\n <\/tr>\n
\n Critical backing pressure (mbar) <\/td>\n \n (D\/H) <\/td>\n \n 18 <\/td>\n <\/tr>\n
\n (T) <\/td>\n \n NA <\/td>\n <\/tr>\n
\n Bake out water cooled\/forced air cooled max. <\/td>\n \n \u00b0C <\/td>\n \n 120\/115\u00b0 <\/td>\n <\/tr>\n
\n Recommended backing pump* <\/td>\n \n <\/td>\n \n nXDS6i <\/td>\n <\/tr>\n
\n Normal rotational speed <\/td>\n \n rpm <\/td>\n \n 90,000 <\/td>\n <\/tr>\n
\n Start time to 90% speed (sec) D\/H (T) <\/td>\n \n <\/td>\n \n 90 <\/td>\n <\/tr>\n
\n Mass (kg) D\/H (T) <\/td>\n \n ISO <\/td>\n \n 2.47 <\/td>\n \n 2.9 <\/td>\n \n 3.0 <\/td>\n \n 3.2 <\/td>\n <\/tr>\n
\n CF <\/td>\n \n 3.5 <\/td>\n \n 4.4 <\/td>\n <\/tr>\n <\/tbody>\n
<\/th> <\/tr> <\/tfoot>\n <\/table>\n <\/div>\n \n <\/div>\n <\/div>\n <\/div>\n
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<\/th>\n <\/tr>\n
\n <\/td>\n \n <\/td>\n \n nEXT240 <\/td>\n \n nEXT300 <\/td>\n \n nEXT300A <\/td>\n \n nEXT400 <\/td>\n \n nEXT400A <\/td>\n <\/tr>\n <\/thead>\n
\n Inlet flange <\/td>\n \n <\/td>\n \n DN100 ISO-K <\/td>\n \n DN100 CF <\/td>\n \n DN100 ISO-K <\/td>\n \n DN100 CF <\/td>\n \n DN100 ISO-K <\/td>\n \n DN100 CF <\/td>\n \n DN160 ISO-K <\/td>\n \n DN160 CF <\/td>\n \n DN100 ISO-K <\/td>\n \n DN100 CF <\/td>\n <\/tr>\n
\n Inlet pumping speed ls-1<\/sup> <\/td>\n \n N2<\/sub> <\/td>\n \n 240 <\/td>\n \n 300 <\/td>\n \n 300 <\/td>\n \n 300 <\/td>\n \n 400 <\/td>\n \n 400 <\/td>\n \n 400 <\/td>\n <\/tr>\n
\n Ar <\/td>\n \n 230 <\/td>\n \n 280 <\/td>\n \n 340 <\/td>\n \n 240 <\/td>\n \n 380 <\/td>\n \n 400 <\/td>\n \n 400 <\/td>\n <\/tr>\n
\n He <\/td>\n \n 230 <\/td>\n \n 340 <\/td>\n \n 280 <\/td>\n \n 280 <\/td>\n \n 390 <\/td>\n \n 325 <\/td>\n \n 325 <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 165 <\/td>\n \n 280 <\/td>\n \n 250 <\/td>\n \n 250 <\/td>\n \n 325 <\/td>\n \n 325 <\/td>\n \n 325 <\/td>\n <\/tr>\n
\n Compression ratio (D) <\/td>\n \n N2<\/sub>\/Ar <\/td>\n \n

> 1 x 1011<\/sup><\/p> <\/td>\n

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> 1 x 1011<\/sup><\/p> <\/td>\n <\/tr>\n

\n He <\/td>\n \n 3 x 105<\/sup> <\/td>\n \n 1 x 106<\/sup> <\/td>\n \n 1 x 108<\/sup> <\/td>\n \n 1 x 108<\/sup> <\/td>\n \n 1 x 109<\/sup> <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 1 x 104<\/sup> <\/td>\n \n 5 x 104<\/sup> <\/td>\n \n 4 x 106<\/sup> <\/td>\n \n 5 x 105<\/sup> <\/td>\n \n 4 x 106<\/sup> <\/td>\n <\/tr>\n
\n Compression ratio (T\/H) <\/td>\n \n N2<\/sub>\/Ar <\/td>\n \n

> 1 x 1011<\/sup><\/p> <\/td>\n

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> 1 x 1011<\/sup><\/p> <\/td>\n <\/tr>\n

\n He <\/td>\n \n 1 x 106<\/sup> <\/td>\n \n 3 x 106<\/sup> <\/td>\n \n 13 <\/td>\n \n >1 x 108<\/sup> <\/td>\n \n 13 <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 1.5 x 104<\/sup> <\/td>\n \n 1 x 105<\/sup> <\/td>\n \n 13 <\/td>\n \n 1 x 106<\/sup> <\/td>\n \n 13 <\/td>\n <\/tr>\n
\n Interstage pumping speed <\/td>\n \n N2<\/sub> ls-1<\/sup> <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n <\/tr>\n
\n He ls-1<\/sup> <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n <\/tr>\n
\n H2<\/sub> ls-1<\/sup> <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n <\/tr>\n
\n Ar ls-1<\/sup> <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n \n 13 <\/td>\n <\/tr>\n
\n Ultimate pressure (mbar) (Torr) <\/td>\n \n <\/td>\n \n

< 6×10-8<\/sup> mbar<\/p> <\/td>\n

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< 5×10-10<\/sup> mbar<\/p> <\/td>\n

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< 6×10-8<\/sup> mbar<\/p> <\/td>\n

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< 5×10-10<\/sup> mbar<\/p> <\/td>\n

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< 6×10-8<\/sup> mbar<\/p> <\/td>\n

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< 5×10-10<\/sup> mbar<\/p> <\/td>\n

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< 6×10-8<\/sup> mbar<\/p> <\/td>\n

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< 5×10-10<\/sup> mbar<\/p> <\/td>\n

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< 1×10-8<\/sup> mbar<\/p> <\/td>\n

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< 1×10-10<\/sup> mbar<\/p> <\/td>\n <\/tr>\n

\n Mass <\/td>\n \n kg <\/td>\n \n 5.7 <\/td>\n \n 8.7 <\/td>\n \n 5.8 <\/td>\n \n 8.5 <\/td>\n \n 6.0 <\/td>\n \n 8.8 <\/td>\n \n 6.2 <\/td>\n \n 10.0 <\/td>\n \n 6.5 <\/td>\n \n 10.2 <\/td>\n <\/tr>\n
\n Backing\/Interstage ports <\/td>\n \n <\/td>\n \n NW25 <\/td>\n <\/tr>\n
\n Vent\/purge port <\/td>\n \n <\/td>\n \n 1\/8 inch BSPP <\/td>\n <\/tr>\n
\n Critical backing pressure <\/td>\n \n mbar <\/td>\n \n

D\/H – 9.5<\/p>\n

T – 20<\/p> <\/td>\n

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D\/H – 9.5<\/p>\r\n

T – 20<\/p> <\/td>\n

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N2<\/sub>\/ – 12<\/p>\n

He – 12.5<\/p>\n

H2<\/sub> – 6<\/p> <\/td>\n

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D\/H – 10<\/p>\n

T – 20<\/p> <\/td>\n

\n

N2<\/sub>\/ – 12<\/p>\r\n

He – 12.5<\/p>\r\n

H2<\/sub> – 6<\/p> <\/td>\n <\/tr>\n

\n Bake out water cooled\/forced air cooled max. <\/td>\n \n \u00b0C <\/td>\n \n 120\/115\u00b0 <\/td>\n \n – <\/td>\n \n – <\/td>\n \n 120\/115\u00b0 <\/td>\n \n – <\/td>\n \n – <\/td>\n <\/tr>\n
\n Recommended backing pump* <\/td>\n \n <\/td>\n \n RV12\/nXDS10i <\/td>\n \n RV12\/nXDS10 <\/td>\n \n RV12\/nXDS10i <\/td>\n \n RV12\/nXDS10 <\/td>\n <\/tr>\n
\n Normal rotational speed <\/td>\n \n rpm <\/td>\n \n 60,000 <\/td>\n <\/tr>\n
\n Start time to 90% speed (sec) D\/H (T) <\/td>\n \n <\/td>\n \n 115 (150) <\/td>\n \n 145 (190) <\/td>\n \n 200 <\/td>\n \n 180 (210) <\/td>\n \n 220 <\/td>\n <\/tr>\n
\n Operation attitude <\/td>\n \n <\/td>\n \n Vertical and upright to horizontal <\/td>\n <\/tr>\n <\/tbody>\n
<\/th> <\/tr> <\/tfoot>\n <\/table>\n <\/div>\n \n <\/div>\n <\/div>\n <\/div>\n
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<\/th>\n <\/tr>\n
\n <\/td>\n \n <\/td>\n \n nEXT730Q <\/td>\n \n nEXT730D <\/td>\n \n nEXT730H <\/td>\n <\/tr>\n <\/thead>\n
\n Inlet flange <\/td>\n \n <\/td>\n \n DN 160 ISO-K <\/td>\n \n DN 160 CF <\/td>\n \n DN 160 ISO-K <\/td>\n \n DN 160 CF <\/td>\n <\/tr>\n
\n Inlet pumping speed ls-1<\/sup> <\/td>\n \n N2<\/sub> <\/td>\n \n 730 <\/td>\n \n 730 <\/td>\n \n 690 <\/td>\n \n 720 <\/td>\n \n 680 <\/td>\n <\/tr>\n
\n Ar <\/td>\n \n 665 <\/td>\n \n 665 <\/td>\n \n 620 <\/td>\n \n 655 <\/td>\n \n 610 <\/td>\n <\/tr>\n
\n He <\/td>\n \n 820 <\/td>\n \n 820 <\/td>\n \n 760 <\/td>\n \n 850 <\/td>\n \n 790 <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 715 <\/td>\n \n 715 <\/td>\n \n 670 <\/td>\n \n 755 <\/td>\n \n 710 <\/td>\n <\/tr>\n
\n Gas throughput mbar ls-1<\/sup> <\/td>\n \n N2<\/sub> <\/td>\n \n

> 40<\/p> <\/td>\n

\n 14 <\/td>\n \n 4 <\/td>\n <\/tr>\n
\n Ar <\/td>\n \n 6.8 <\/td>\n \n 3.5 <\/td>\n \n 2.6 <\/td>\n <\/tr>\n
\n He <\/td>\n \n

> 50<\/p> <\/td>\n

\n 21 <\/td>\n \n 7 <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n

> 40<\/p> <\/td>\n

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> 14<\/p> <\/td>\n

\n 17 <\/td>\n <\/tr>\n
\n Compression ratio*** <\/td>\n \n N2<\/sub> <\/td>\n \n

> 1 x 108<\/sup><\/p> <\/td>\n

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> 1 x 1011<\/sup><\/p> <\/td>\n

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> 1 x 1013<\/sup><\/p> <\/td>\n <\/tr>\n

\n Ar <\/td>\n \n

> 1 x 108<\/sup><\/p> <\/td>\n

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> 1 x 1011<\/sup><\/p> <\/td>\n

\n

> 1 x 1013<\/sup><\/p> <\/td>\n <\/tr>\n

\n He <\/td>\n \n 1 x 105<\/sup> <\/td>\n \n 1.2 x 108<\/sup> <\/td>\n \n 5 x 109<\/sup> <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 1 x 104<\/sup> <\/td>\n \n 4 x 106<\/sup> <\/td>\n \n 3 x 108<\/sup> <\/td>\n <\/tr>\n
\n Ultimate pressure** (mbar) <\/td>\n \n <\/td>\n \n

> 1×10-7<\/sup><\/p> <\/td>\n

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> 7×10-9<\/sup><\/sup><\/p> <\/td>\n

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> 3×10-10<\/sup><\/sup><\/p> <\/td>\n

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> 7×10-9<\/sup><\/p> <\/td>\n

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> 1×10-10<\/sup><\/p> <\/td>\n <\/tr>\n

\n Max. permissible backing pressure (mbar) <\/td>\n \n <\/td>\n \n 6 <\/td>\n \n 15 <\/td>\n \n 12 <\/td>\n <\/tr>\n
\n Normal rotational speed <\/td>\n \n rpm <\/td>\n \n 49200 <\/td>\n <\/tr>\n
\n Start time to 90% speed (sec) <\/td>\n \n min <\/td>\n \n 2.5 <\/td>\n <\/tr>\n
\n Max. power consumption (W) <\/td>\n \n W <\/td>\n \n 500 (default), 600 (max.) <\/td>\n <\/tr>\n
\n Power consumption at ultimate pressure (W) <\/td>\n \n W <\/td>\n \n 40 <\/td>\n <\/tr>\n
\n Type of protection <\/td>\n \n IP <\/td>\n \n 54 <\/td>\n <\/tr>\n
\n Recommended cooling method <\/td>\n \n <\/td>\n \n Water* <\/td>\n \n Convection* <\/td>\n <\/tr>\n
\n Optional cooling <\/td>\n \n <\/td>\n \n n\/a <\/td>\n \n Air or Water* <\/td>\n <\/tr>\n
\n Cooling water connection <\/td>\n \n inch <\/td>\n \n Plug-in connection for 6×1 hose\/alternative G 1\/8 <\/td>\n <\/tr>\n
\n Cooling water consumption <\/td>\n \n I\/h <\/td>\n \n 60 <\/td>\n <\/tr>\n
\n Critical cooling water pressure <\/td>\n \n bar(g) <\/td>\n \n 6 <\/td>\n <\/tr>\n
\n Permissible cooling water temperature <\/td>\n \n \u00b0C <\/td>\n \n 15 to 35 <\/td>\n <\/tr>\n
\n Mass <\/td>\n \n kg <\/td>\n \n 15.4 <\/td>\n \n 14.6 <\/td>\n \n 19.6 <\/td>\n \n 14.6 <\/td>\n \n 19.6 <\/td>\n <\/tr>\n
\n Recommended backing pump* <\/td>\n \n <\/td>\n \n nXRi, XDS35i, E2M28** <\/td>\n <\/tr>\n
\n Noise level with convection cooling with radial air cooler <\/td>\n \n dB(A) <\/td>\n \n

> 40<\/p>\n

n\/a<\/p> <\/td>\n

\n

> 40<\/p>\n

> 55<\/p> <\/td>\n <\/tr>\n

\n Water cooled\/forced air cooled max. bake out <\/td>\n \n \u00b0C <\/td>\n \n n\/a <\/td>\n \n 100 <\/td>\n <\/tr>\n
\n Purge gas flow <\/td>\n \n mbar \u00b7 Is-1 <\/td>\n \n 0.4 <\/td>\n <\/tr>\n
\n sccm <\/td>\n \n 24 <\/td>\n <\/tr>\n
\n Vent\/purge port (inch) <\/td>\n \n inch <\/td>\n \n G 1\/8 <\/td>\n <\/tr>\n <\/tbody>\n
<\/th> <\/tr> <\/tfoot>\n <\/table>\n <\/div>\n \n <\/div>\n <\/div>\n <\/div>\n
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<\/th>\n <\/tr>\n
\n <\/td>\n \n <\/td>\n \n nEXT930Q <\/td>\n \n nEXT930D <\/td>\n \n nEXT1230H <\/td>\n <\/tr>\n <\/thead>\n
\n Inlet flange <\/td>\n \n <\/td>\n \n DN 160 ISO-K <\/td>\n \n DN 160 CF <\/td>\n \n DN 200 CF <\/td>\n \n DN 200 ISO-F <\/td>\n \n DN 200 ISO-K <\/td>\n <\/tr>\n
\n Inlet pumping speed ls-1<\/sup> <\/td>\n \n N2<\/sub> <\/td>\n \n 925 <\/td>\n \n 925 <\/td>\n \n 870 <\/td>\n \n 1250 <\/td>\n <\/tr>\n
\n Ar <\/td>\n \n 865 <\/td>\n \n 865 <\/td>\n \n 810 <\/td>\n \n 1150 <\/td>\n <\/tr>\n
\n He <\/td>\n \n 905 <\/td>\n \n 905 <\/td>\n \n 840 <\/td>\n \n 1350 <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 735 <\/td>\n \n 735 <\/td>\n \n 690 <\/td>\n \n 1150 <\/td>\n <\/tr>\n
\n Gas throughput mbar ls-1<\/sup> <\/td>\n \n N2<\/sub> <\/td>\n \n

> 40<\/p> <\/td>\n

\n 14 <\/td>\n \n 9 <\/td>\n <\/tr>\n
\n Ar <\/td>\n \n 6.8 <\/td>\n \n 3.5 <\/td>\n \n 3 <\/td>\n <\/tr>\n
\n He <\/td>\n \n

> 50<\/p> <\/td>\n

\n 21 <\/td>\n \n

> 20<\/p> <\/td>\n <\/tr>\n

\n H2<\/sub> <\/td>\n \n

> 50<\/p> <\/td>\n

\n

> 14<\/p> <\/td>\n

\n

> 20<\/p> <\/td>\n <\/tr>\n

\n Compression ratio*** <\/td>\n \n N2<\/sub> <\/td>\n \n

> 1 x 108<\/sup><\/p> <\/td>\n

\n

> 1 x 1011<\/sup><\/p> <\/td>\n

\n

> 1 x 1011<\/sup><\/p> <\/td>\n <\/tr>\n

\n Ar <\/td>\n \n

> 1 x 108<\/sup><\/p> <\/td>\n

\n

> 1 x 1011<\/sup><\/p> <\/td>\n

\n

> 1 x 1011<\/sup><\/p> <\/td>\n <\/tr>\n

\n He <\/td>\n \n 1 x 105<\/sup> <\/td>\n \n 1.2 x 108<\/sup> <\/td>\n \n 4 x 108<\/sup> <\/td>\n <\/tr>\n
\n H2<\/sub> <\/td>\n \n 1 x 104<\/sup> <\/td>\n \n 4.2 x 106<\/sup> <\/td>\n \n 1 x 107<\/sup> <\/td>\n <\/tr>\n
\n Ultimate pressure** <\/td>\n \n mbar <\/td>\n \n

> 1×10-7<\/sup><\/p> <\/td>\n

\n

> 7×10-9<\/sup><\/sup><\/p> <\/td>\n

\n

> 3×10-10<\/sup><\/sup><\/p> <\/td>\n

\n

> 5×10-10<\/sup><\/p> <\/td>\n

\n

> 5×10-9<\/sup><\/p> <\/td>\n <\/tr>\n

\n Max. permissible backing pressure <\/td>\n \n mbar <\/td>\n \n 6 <\/td>\n \n 15 <\/td>\n \n 15 <\/td>\n <\/tr>\n
\n Normal rotational speed <\/td>\n \n rpm <\/td>\n \n 49200 <\/td>\n <\/tr>\n
\n Start time to 90% speed (sec) <\/td>\n \n min <\/td>\n \n 2.5 <\/td>\n <\/tr>\n
\n Max. power consumption <\/td>\n \n W <\/td>\n \n 500 (default), 600 (max.) <\/td>\n \n 660 (default), 800 (max.) <\/td>\n <\/tr>\n
\n Power consumption at ultimate pressure <\/td>\n \n W <\/td>\n \n 40 <\/td>\n \n 50 <\/td>\n <\/tr>\n
\n Type of protection <\/td>\n \n IP <\/td>\n \n 54 <\/td>\n \n 54 <\/td>\n <\/tr>\n
\n Recommended cooling method <\/td>\n \n <\/td>\n \n Water* <\/td>\n \n Convection* <\/td>\n \n Water* <\/td>\n <\/tr>\n
\n Optional cooling <\/td>\n \n <\/td>\n \n n\/a <\/td>\n \n Air or Water* <\/td>\n \n Forced air cooling* <\/td>\n <\/tr>\n
\n Cooling water connection <\/td>\n \n inch <\/td>\n \n Plug-in connection for 6×1 hose\/alternative G 1\/8 <\/td>\n <\/tr>\n
\n Cooling water consumption <\/td>\n \n I\/h <\/td>\n \n 60 <\/td>\n <\/tr>\n
\n Critical cooling water pressure <\/td>\n \n bar(g) <\/td>\n \n 6 <\/td>\n \n 15 <\/td>\n <\/tr>\n
\n Permissible cooling water temperature <\/td>\n \n \u00b0C <\/td>\n \n 15 to 35 <\/td>\n <\/tr>\n
\n Mass <\/td>\n \n kg <\/td>\n \n 15.4 <\/td>\n \n 14.6 <\/td>\n \n 19.6 <\/td>\n \n 32.6 <\/td>\n \n 24.9 <\/td>\n \n 23.7 <\/td>\n <\/tr>\n
\n Recommended backing pump* <\/td>\n \n <\/td>\n \n nXRi, XDS35i, E2M28** <\/td>\n <\/tr>\n
\n Noise level with convection cooling with radial air cooler <\/td>\n \n dB(A) <\/td>\n \n

> 40<\/p>\n

n\/a<\/p> <\/td>\n

\n

> 40<\/p>\n

> 55<\/p> <\/td>\n

\n

> 40<\/p>\r\n

> 55<\/p> <\/td>\n <\/tr>\n

\n Water cooled\/forced air cooled max. bake out <\/td>\n \n \u00b0C <\/td>\n \n n\/a <\/td>\n \n 100 <\/td>\n \n n\/a <\/td>\n <\/tr>\n
\n Purge gas flow <\/td>\n \n mbar \u00b7 Is-1<\/sup> <\/td>\n \n 0.4 <\/td>\n <\/tr>\n
\n sccm <\/td>\n \n 24 <\/td>\n <\/tr>\n
\n Vent\/purge port <\/td>\n \n inch <\/td>\n \n G 1\/8 <\/td>\n <\/tr>\n <\/tbody>\n
<\/th> <\/tr> <\/tfoot>\n <\/table>\n <\/div>\n \n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/section>\n\t","protected":false},"template":"","meta":{"touch_screen_menu_bg_media":0,"touch_screen_header_image":0,"footnotes":""},"brochures":[47],"class_list":["post-7760","brochure_page","type-brochure_page","status-publish","hentry","brochures-next-turbomolecular-pumps-3601-0886-01"],"_links":{"self":[{"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/wp-json\/wp\/v2\/brochure_page\/7760","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/wp-json\/wp\/v2\/brochure_page"}],"about":[{"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/wp-json\/wp\/v2\/types\/brochure_page"}],"version-history":[{"count":13,"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/wp-json\/wp\/v2\/brochure_page\/7760\/revisions"}],"predecessor-version":[{"id":11590,"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/wp-json\/wp\/v2\/brochure_page\/7760\/revisions\/11590"}],"wp:attachment":[{"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/wp-json\/wp\/v2\/media?parent=7760"}],"wp:term":[{"taxonomy":"brochures","embeddable":true,"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/edwards\/wp-json\/wp\/v2\/brochures?post=7760"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}