{"id":13874,"date":"2026-01-11T12:50:17","date_gmt":"2026-01-11T12:50:17","guid":{"rendered":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/?post_type=brochure_page&p=13874"},"modified":"2026-03-30T09:46:28","modified_gmt":"2026-03-30T09:46:28","slug":"technical-data-4","status":"publish","type":"brochure_page","link":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/brochure\/3610-0052-02-turbovac-i-multi-inlet\/technical-data-4\/","title":{"rendered":"Technical data"},"content":{"rendered":"
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\n \n <\/span>\n <\/span>\n Technical data<\/span>\n <\/span>\n <\/h1>\n <\/div>\n <\/div>\n\t<\/div>\n<\/section>\n\n\n
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\n \n <\/span>\n <\/span>\n Cartridges<\/span>\n <\/span>\n <\/h2>\n <\/div>\n <\/div>\n\t<\/div>\n<\/section>\n\n\n
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<\/th>\n <\/tr>\n
\n <\/td>\n \n TURBOVAC 90\/30\/10 iC <\/td>\n \n TURBOVAC 250-100 iC <\/td>\n \n TURBOVAC 350\/300\/50 iC <\/td>\n \n TURBOVAC 400\/300\/60 iC <\/td>\n <\/tr>\n <\/thead>\n
\n Flange Dimensions (mm) <\/td>\n <\/tr>\n
\n High vacuum connection HV <\/td>\n \n \u00f881 <\/td>\n \n \u00f8105 <\/td>\n \n \u00f8144 <\/td>\n \n \u00f8144 <\/td>\n <\/tr>\n
\n Intermediate stage IS1 <\/td>\n \n \u00f8100 x 18 <\/td>\n \n \u00f8124 x 19.8 <\/td>\n \n \u00f8159.6 x 44 <\/td>\n \n \u00f8159.6 x 44 <\/td>\n <\/tr>\n
\n Intermediate stage IS2 <\/td>\n \n \u00f8108.5 x 11.5 <\/td>\n \n n\/a <\/td>\n \n \u00f8167.6 x 20 <\/td>\n \n \u00f8167.6 x 20 <\/td>\n <\/tr>\n
\n Flange (out) FV <\/td>\n \n DN16 ISO-KF <\/td>\n \n DN16 ISO-KF <\/td>\n \n DN25 ISO-KF <\/td>\n \n DN25 ISO-KF <\/td>\n <\/tr>\n
\n Rotation speed \u00b12% <\/td>\n \n 1200 Hz <\/td>\n \n 1200 Hz <\/td>\n \n 1000 Hz <\/td>\n \n 1000 Hz <\/td>\n <\/tr>\n
\n Pumping Speed (l\/s) <\/td>\n <\/tr>\n
\n N2<\/sub>on HV <\/td>\n \n 90 <\/td>\n \n 250 <\/td>\n \n 350 <\/td>\n \n 400 <\/td>\n <\/tr>\n
\n He on HV <\/td>\n \n 90 <\/td>\n \n 250 <\/td>\n \n 350 <\/td>\n \n 400 <\/td>\n <\/tr>\n
\n N2<\/sub> on IS1 <\/td>\n \n 30 <\/td>\n \n 100 <\/td>\n \n 250 <\/td>\n \n 300 <\/td>\n <\/tr>\n
\n He on IS1 <\/td>\n \n 30 <\/td>\n \n 50 <\/td>\n \n 250 <\/td>\n \n 300 <\/td>\n <\/tr>\n
\n N2<\/sub> on IS2 <\/td>\n \n 10 <\/td>\n \n n\/a <\/td>\n \n 50 <\/td>\n \n 60 <\/td>\n <\/tr>\n
\n He on IS2 <\/td>\n \n 10 <\/td>\n \n n\/a <\/td>\n \n 40 <\/td>\n \n 50 <\/td>\n <\/tr>\n
\n Gas throughput at full rotation speed (mbarl\/s) <\/td>\n <\/tr>\n
\n N2<\/sub> on HV <\/td>\n \n 3 <\/td>\n \n 6 <\/td>\n \n 4 <\/td>\n \n 4 <\/td>\n <\/tr>\n
\n N2<\/sub> on IS1 <\/td>\n \n 3 <\/td>\n \n 6 <\/td>\n \n 4 <\/td>\n \n 4 <\/td>\n <\/tr>\n
\n N2<\/sub> on IS2 <\/td>\n \n 3 <\/td>\n \n n\/a <\/td>\n \n 6 <\/td>\n \n 8 <\/td>\n <\/tr>\n
\n Compression ratio (at no flow) <\/td>\n <\/tr>\n
\n N2<\/sub> (H1\/H) <\/td>\n \n 3.4 x 103<\/sup> <\/td>\n \n 8.0 x 103<\/sup> <\/td>\n \n 4.0 x 107<\/sup> <\/td>\n \n 3.0 x 104<\/sup> <\/td>\n <\/tr>\n
\n N2<\/sub> (H2\/H1) <\/td>\n \n 6.0 x 102<\/sup> <\/td>\n \n n\/a <\/td>\n \n 3.0 x 103<\/sup> <\/td>\n \n 3.0 x 103<\/sup> <\/td>\n <\/tr>\n
\n N2<\/sub> (FV\/H2) <\/td>\n \n 2.0 x 106<\/sup> <\/td>\n \n 3.0 x 109<\/sup> <\/td>\n \n 9.0 x 104<\/sup> <\/td>\n \n 8.0 x 104<\/sup> <\/td>\n <\/tr>\n
\n N2<\/sub> (FV\/H) <\/td>\n \n 1.0 x 1011<\/sup> <\/td>\n \n 1.0 x 1011<\/sup> <\/td>\n \n 1.0 x 1011<\/sup> <\/td>\n \n 1.0 x 1011<\/sup> <\/td>\n <\/tr>\n
\n He (H1\/H) <\/td>\n \n 2.2 x 101<\/sup> <\/td>\n \n 3.5 x 101<\/sup> <\/td>\n \n 1.0 x 103<\/sup> <\/td>\n \n 6.0 x 101<\/sup> <\/td>\n <\/tr>\n
\n He (H2\/H1) <\/td>\n \n 1.4 x 101<\/sup> <\/td>\n \n n\/a <\/td>\n \n 0.3 x 101<\/sup> <\/td>\n \n 2.5 x 101<\/sup> <\/td>\n <\/tr>\n
\n He (FV\/H2) <\/td>\n \n 1.3 x 103<\/sup> <\/td>\n \n 2.4 x 104<\/sup> <\/td>\n \n 7.0 x 102<\/sup> <\/td>\n \n 4.0 x 102<\/sup> <\/td>\n <\/tr>\n
\n He (FV\/H) <\/td>\n \n 4.2 x 105<\/sup> <\/td>\n \n 8.0 x 105<\/sup> <\/td>\n \n 2.0 x 107<\/sup> <\/td>\n \n 6.0 x 105<\/sup> <\/td>\n <\/tr>\n
\n Fore-vacuum pressure max. (mbar) <\/td>\n <\/tr>\n
\n N2<\/sub> on FV <\/td>\n \n n\/a <\/td>\n \n 14 <\/td>\n \n 10 <\/td>\n \n 10 <\/td>\n <\/tr>\n
\n Weight (kg) <\/td>\n \n 3.1 <\/td>\n \n 3.8 <\/td>\n \n 8 <\/td>\n \n 7.7 <\/td>\n <\/tr>\n <\/tbody>\n
<\/th> <\/tr> <\/tfoot>\n <\/table>\n <\/div>\n \n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/section>\n\t\n\n
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\n \n <\/span>\n <\/span>\n MI-Pumps<\/span>\n <\/span>\n <\/h2>\n <\/div>\n <\/div>\n\t<\/div>\n<\/section>\n\n\n
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<\/th>\n <\/tr>\n
\n <\/td>\n \n TURBOVAC 90\/10\/10 i <\/td>\n \n TURBOVAC 90-30 i <\/td>\n \n TURBOVAC 90\/30\/10 i <\/td>\n <\/tr>\n <\/thead>\n
\n Flange Dimensions (mm) <\/td>\n <\/tr>\n
\n High vacuum connection HV <\/td>\n \n 28 x 10 <\/td>\n \n 62 x 47.5 <\/td>\n \n 72 x 47.5 <\/td>\n <\/tr>\n
\n Intermediate stage IS1 <\/td>\n \n 28 x 5 <\/td>\n \n 65 x 17.5 <\/td>\n \n 72 x 17.5 <\/td>\n <\/tr>\n
\n Intermediate stage IS2 <\/td>\n \n 28 x 5 <\/td>\n \n n\/a <\/td>\n \n 62 x 12.1 <\/td>\n <\/tr>\n
\n Flange (out) FV <\/td>\n \n Hose OD \u00f818.7 with O-ring <\/td>\n \n DN16 ISO-KF <\/td>\n \n DN16 ISO-KF <\/td>\n <\/tr>\n
\n Rotation speed \u00b12% <\/td>\n \n 1200 Hz <\/td>\n \n 1200 Hz <\/td>\n \n 1200 Hz <\/td>\n <\/tr>\n
\n Pumping Speed (l\/s) <\/td>\n <\/tr>\n
\n N2 on HV <\/td>\n \n 90 <\/td>\n \n 90 <\/td>\n \n 250 <\/td>\n <\/tr>\n
\n He on HV <\/td>\n \n 90 <\/td>\n \n 90 <\/td>\n \n 250 <\/td>\n <\/tr>\n
\n N2 on IS1 <\/td>\n \n 10 <\/td>\n \n 30 <\/td>\n \n 100 <\/td>\n <\/tr>\n
\n He on IS1 <\/td>\n \n 10 <\/td>\n \n 30 <\/td>\n \n 50 <\/td>\n <\/tr>\n
\n N2 on IS2 <\/td>\n \n 10 <\/td>\n \n n\/a <\/td>\n \n n\/a <\/td>\n <\/tr>\n
\n He on IS2 <\/td>\n \n 10 <\/td>\n \n n\/a <\/td>\n \n n\/a <\/td>\n <\/tr>\n
\n Gas throughput at full rotation speed (mbarl\/s) <\/td>\n <\/tr>\n
\n N2 on HV <\/td>\n \n 3 <\/td>\n \n 3 <\/td>\n \n 3 <\/td>\n <\/tr>\n
\n N2 on IS1 <\/td>\n \n 3 <\/td>\n \n 3 <\/td>\n \n 3 <\/td>\n <\/tr>\n
\n N2 on IS2 <\/td>\n \n 3 <\/td>\n \n n\/a <\/td>\n \n 3 <\/td>\n <\/tr>\n
\n Compression ratio (at no flow) <\/td>\n <\/tr>\n
\n N2 (H1\/H) <\/td>\n \n 2.5 x 103<\/sup> <\/td>\n \n 2.0 x 102<\/sup> <\/td>\n \n 3.4 x 103<\/sup> <\/td>\n <\/tr>\n
\n N2 (H2\/H1) <\/td>\n \n 1.0 x 103<\/sup> <\/td>\n \n n\/a <\/td>\n \n 6.0 x 102<\/sup> <\/td>\n <\/tr>\n
\n N2 (FV\/H2) <\/td>\n \n 5.0 x 104<\/sup> <\/td>\n \n 3.0 x 107<\/sup> <\/td>\n \n 2.0 x 106<\/sup> <\/td>\n <\/tr>\n
\n N2 (FV\/H) <\/td>\n \n > 1.0 x 101<\/sup>1 <\/td>\n \n 6.0 x 109<\/sup> <\/td>\n \n > 1.0 x 101<\/sup> <\/td>\n <\/tr>\n
\n He (H1\/H) <\/td>\n \n 4.0 x 104<\/sup> <\/td>\n \n 0.7 x 101<\/sup> <\/td>\n \n 2.2 x 101<\/sup> <\/td>\n <\/tr>\n
\n He (H2\/H1) <\/td>\n \n 1.0 x 103<\/sup> <\/td>\n \n n\/a <\/td>\n \n 1.4 x 101<\/sup> <\/td>\n <\/tr>\n
\n He (FV\/H2) <\/td>\n \n 4.0 x 102<\/sup> <\/td>\n \n 3.7 x 103<\/sup> <\/td>\n \n 1.3 x 103<\/sup> <\/td>\n <\/tr>\n
\n He (FV\/H) <\/td>\n \n 5.0 x 106<\/sup> <\/td>\n \n 2.7 x 104<\/sup> <\/td>\n \n 4.2 x 105<\/sup> <\/td>\n <\/tr>\n
\n Fore-vacuum pressure max. (mbar) <\/td>\n <\/tr>\n
\n N2 on FV <\/td>\n \n 15 <\/td>\n \n 14 <\/td>\n \n n\/a <\/td>\n <\/tr>\n
\n Weight (kg) <\/td>\n \n 4.2 <\/td>\n \n 4.7 <\/td>\n \n 4.7 <\/td>\n <\/tr>\n <\/tbody>\n
<\/th> <\/tr> <\/tfoot>\n <\/table>\n <\/div>\n \n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/section>\n\t\n\n
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\n \n <\/span>\n <\/span>\n System<\/span>\n <\/span>\n <\/h2>\n <\/div>\n <\/div>\n\t<\/div>\n<\/section>\n\n\n
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<\/th>\n <\/tr>\n
\n <\/td>\n \n TURBOVAC 250\/100 HV system <\/td>\n \n TURBOVAC 300\/250\/30 HV system \/DN100 <\/td>\n \n TURBOVAC 400\/300\/60 HV system \/Standard <\/td>\n <\/tr>\n <\/thead>\n
\n Flange Dimensions (mm) <\/td>\n <\/tr>\n
\n High vacuum connection HV <\/td>\n \n 110 x 100 <\/td>\n \n DN100 CF \/ \u00f8102 <\/td>\n \n 132 x 93.5 <\/td>\n <\/tr>\n
\n Intermediate stage IS1 <\/td>\n \n 100 x 32.5 <\/td>\n \n DN100 CF \/ \u00f8102 <\/td>\n \n 132 x 76.5 <\/td>\n <\/tr>\n
\n Intermediate stage IS2 <\/td>\n \n n\/a <\/td>\n \n DN25 ISO-KF <\/td>\n \n 132 x 24.5 <\/td>\n <\/tr>\n
\n Flange (out) FV <\/td>\n \n DN16 ISO-KF <\/td>\n \n DN25 ISO-KF <\/td>\n \n DN25 ISO-KF <\/td>\n <\/tr>\n
\n Rotation speed \u00b12% <\/td>\n \n 1200 Hz <\/td>\n \n 1000 Hz <\/td>\n \n 1000 Hz <\/td>\n <\/tr>\n
\n Pumping Speed (l\/s) <\/td>\n <\/tr>\n
\n N2 on HV <\/td>\n \n 250 <\/td>\n \n 300 <\/td>\n \n 400 <\/td>\n <\/tr>\n
\n He on HV <\/td>\n \n 250 <\/td>\n \n 300 <\/td>\n \n 400 <\/td>\n <\/tr>\n
\n N2 on IS1 <\/td>\n \n 100 <\/td>\n \n 250 <\/td>\n \n 300 <\/td>\n <\/tr>\n
\n He on IS1 <\/td>\n \n 50 <\/td>\n \n 250 <\/td>\n \n 300 <\/td>\n <\/tr>\n
\n N2 on IS2 <\/td>\n \n n\/a <\/td>\n \n 30 <\/td>\n \n 60 <\/td>\n <\/tr>\n
\n He on IS2 <\/td>\n \n n\/a <\/td>\n \n 30 <\/td>\n \n 50 <\/td>\n <\/tr>\n
\n Gas throughput at full rotation speed (mbarl\/s) <\/td>\n <\/tr>\n
\n N2 on HV <\/td>\n \n n\/a <\/td>\n \n 4 <\/td>\n \n 4 <\/td>\n <\/tr>\n
\n N2 on IS1 <\/td>\n \n n\/a <\/td>\n \n 4 <\/td>\n \n 4 <\/td>\n <\/tr>\n
\n N2 on IS2 <\/td>\n \n n\/a <\/td>\n \n 8 <\/td>\n \n 8 <\/td>\n <\/tr>\n
\n Compression ratio (at no flow) <\/td>\n <\/tr>\n
\n N2 (H1\/H) <\/td>\n \n 3.5 x 102<\/sup> <\/td>\n \n 3.0 x 104<\/sup> <\/td>\n \n 3.0 x 104<\/sup> <\/td>\n <\/tr>\n
\n N2 (H2\/H1) <\/td>\n \n n\/a <\/td>\n \n 3.0 x 103<\/sup> <\/td>\n \n 3.0 x 103<\/sup> <\/td>\n <\/tr>\n
\n N2 (FV\/H2) <\/td>\n \n 3.0 x 109<\/sup> <\/td>\n \n 8.0 x 104<\/sup> <\/td>\n \n 8.0 x 104<\/sup> <\/td>\n <\/tr>\n
\n N2 (FV\/H) <\/td>\n \n > 1.0 x 101<\/sup>1 <\/td>\n \n > 1.0 x 101<\/sup>1 <\/td>\n \n > 1.0 x 101<\/sup>1 <\/td>\n <\/tr>\n
\n He (H1\/H) <\/td>\n \n 1 x 101<\/sup> <\/td>\n \n 6.0 x 101<\/sup> <\/td>\n \n 6.0 x 101<\/sup> <\/td>\n <\/tr>\n
\n He (H12\/H1) <\/td>\n \n n\/a <\/td>\n \n 2.5 x 101<\/sup> <\/td>\n \n 2.5 x 101<\/sup> <\/td>\n <\/tr>\n
\n He (FV\/H2) <\/td>\n \n 2.4 x 104<\/sup> <\/td>\n \n 4.0 x 102<\/sup> <\/td>\n \n 4.0 x 102<\/sup> <\/td>\n <\/tr>\n
\n He (FV\/H) <\/td>\n \n 2.4 x 105<\/sup> <\/td>\n \n 6.0 x 105<\/sup> <\/td>\n \n 6.0 x 105<\/sup> <\/td>\n <\/tr>\n
\n Fore-vacuum pressure max. (mbar) <\/td>\n <\/tr>\n
\n N2 on FV <\/td>\n \n 14 <\/td>\n \n 10 <\/td>\n \n 10 <\/td>\n <\/tr>\n
\n Weight (kg) <\/td>\n \n 8.3 <\/td>\n \n 17.5 <\/td>\n \n 15.6 <\/td>\n <\/tr>\n <\/tbody>\n
<\/th> <\/tr> <\/tfoot>\n <\/table>\n <\/div>\n \n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n <\/section>\n\t\n\n
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H: main inlet | H1: first interstage | H2: second interstage | FV: fore-vacuum<\/p>\n\n <\/div>\n <\/div>\n\t<\/div>\n<\/section>\n","protected":false},"template":"","meta":{"touch_screen_menu_bg_media":0,"touch_screen_header_image":0,"footnotes":""},"brochures":[62],"class_list":["post-13874","brochure_page","type-brochure_page","status-publish","hentry","brochures-3610-0052-02-turbovac-i-multi-inlet"],"_links":{"self":[{"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/wp-json\/wp\/v2\/brochure_page\/13874","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/wp-json\/wp\/v2\/brochure_page"}],"about":[{"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/wp-json\/wp\/v2\/types\/brochure_page"}],"version-history":[{"count":6,"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/wp-json\/wp\/v2\/brochure_page\/13874\/revisions"}],"predecessor-version":[{"id":15455,"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/wp-json\/wp\/v2\/brochure_page\/13874\/revisions\/15455"}],"wp:attachment":[{"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/wp-json\/wp\/v2\/media?parent=13874"}],"wp:term":[{"taxonomy":"brochures","embeddable":true,"href":"https:\/\/digital-tool-creator.vintageproductions.eu\/leybold\/wp-json\/wp\/v2\/brochures?post=13874"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}